MEMS stands for Micro-Electro Mechanical Systems. Electronic circuits and Mechanical devices can be manufactured on a silicon chip with the help of MEMS techniques. Thus, making the manufacturing of complex microscopic items like sensor chips with built-in electronics possible. There are several different ways to manufacture MEMS. For thin-film fabrication of integrated MEMS parts, techniques like etching and electroplating are used. The whole fabrication of MEMS devices is conducted on a ... Read more