Micro- and nanofabrication refers to the production of devices at the micrometer (0.001 mm) or 100 nanometer scale. Devices are produced by making a pattern and transferring it extremely accurately onto a silicon base layer by means of lithographic techniques. Furthermore, there is no such definition of what separates nanofabrication from micro fabrication. However, to meet the continuous challenge of shrinking component size in microelectronics, advanced tools and techniques are ... Read more

Micro- and nanofabrication refers to the production of devices at the micrometer (0.001 mm) or 100 nanometer scale. Devices are produced by making a pattern and transferring it extremely accurately onto a silicon base layer by means of lithographic techniques. Furthermore, there is no such definition of what separates nanofabrication from micro fabrication. However, to meet the continuous challenge of shrinking component size in microelectronics, advanced tools and techniques are ... Read more

Micro- and nanofabrication refers to the production of devices at the micrometer (0.001 mm) or 100 nanometer scale. Devices are produced by making a pattern and transferring it extremely accurately onto a silicon base layer by means of lithographic techniques. Furthermore, there is no such definition of what separates nanofabrication from micro fabrication. However, to meet the continuous challenge of shrinking component size in microelectronics, advanced tools and techniques are ... Read more