Microelectromechanical systems (MEMS) include micromechanical elements, sensors, actuators, and electronics on a common silicon substrate through microfabrication technology. MEMS technology combines electrical and mechanical components at the micro scale to create micro miniature devices and systems using technologies like microsensors, microactuators, and microelectronics. MEMS allow the integration of mechanical elements, sensors, actuators and electronics onto a common silicon substrate ... Read more
Microelectromechanical systems (MEMS) technology involves the integration of mechanical elements, sensors, actuators and electronics on a common silicon substrate through microfabrication technology. Originally designed for applications in areas like automotive, biotechnology and defense, MEMS are now starting to make their presence felt in a wide variety of consumer electronic products and industrial equipment that impact daily life. ... Read more
