Load port modules are electronic devices facilitating loading and unloading of wafer cassettes or PODs to and from process tools like CVD, etch tools in the front-end semiconductor manufacturing. The modules provide isolation between various manufacturing environments with standards like GEM 300/500 standards improving device uniformity and yield.
The global Load Port Module Market is estimated to be valued at US$ 411.7 Mn in 2023 and is ... Read more
